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Semplastics Product Example - CMP Rings

Semplastics has expertise involving plastics with the following characteristics prized in the semiconductor industry:

Conductive Wear Resistant
ESD Limiting High Temperature
High Purity Chemical Resistant
High Resistivity Structural Applications



These plastics include Polyimide, Vespel, PEEK, Torlon, Teflon, CPVC, C-10, Delrin, Ertalyte, PPS, Celazole, Ultem, Kynar, Halar, Etc.

With proper definition of the operating environment of the plastic component, Semplastics can evaluate the appropriateness of the plastics base material and the suitability of a replacement with a reduced cost of ownership.


There are 2 primary paths in order to interact with Semplastics:

  1. Provide a drawing to Semplastics using the following software packages:

    AutoCad Pro/E MasterCAM
    Mechanical Desktop SolidWorks ParaSolids




  2. Provide Semplastics with an unused plastic component that needs to be improved. (For parts that have a definite life cycle, it is recommended that a used part also be provided in order that Semplastics can understand and improve the wear properties or design of the component.)


The following are process areas where Semplastics has active projects:

  • CMP
    Semplastics' CMP retaining rings are world renowned for having the tightest precision tolerances in the industry. The flatness and parallelism of these retaining rings impacts CMP processing specifications. In addition, Semplastics' CMP abrasion testing has identified proprietary plastic formulations that extend ring life for specific CMP processes.
    C-10 is Semplastics' newest proprietary formulation. The CMP abrasion performance of C-10 is documented in the following PDF file.

  • WETS/Cleans
    WETS/Cleans semiconductor equipment uses high precision plastics exclusively. Semplastics has produced a number of copy exact parts to reduce spare parts costs for our customers. The intricate and complex nature of WETS/Cleans plastic parts provides an excellent opportunity for Semplastics to save our customers money.

  • Photolithography
    Semplastics has produced copy exact plastic spin chucks for various coating and developing systems. Semplastics components significantly reduce Cost of Ownership for these ESD protective spin chucks. In all cases, the plastic component costs have been reduced by over 50%!